AUTO Matching Box
High-performance Auto Matching Box
NRF’s Auto Matching Box is custom designed to match your specifications and equipment. We design to best match your specific plasma load for stable plasma supply to equipment.
High speed matching
Our developmental technology enables high-speed matching.
Corresponds to multiple frequency superposition
NRF Auto Matching Box corresponds to multiple frequency and DC power supply superposition.
|Passing power||5kW (maximum current 70Arms)|
|Matching mode||Automatic or manual (able to switchover)|
|Input connector||LC female or negotiable|
|Output||Bus bar or negotiable|
|Cooling system||Concomitant use of cool water and cool air|
|Matching time||At preset use within 0.5sec|
|External analog I/O||0-10.0V|
|External serial communication||RS232C/RS422/Device Net
*Please inquire about corresponding models.